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Coherix Launches Business Unit for Three-Dimensional Multispectral Metrology and Machine Vision Solutions

Coherix, a supplier of three-dimensional noncontact metrology and inspection products for the semiconductor and automotive industries, has launched a business unit, which would execute grant and contract developments of advanced metrology custom machine vision solutions.

Four major contracts from industrial and government clients have been acquired by the Coherix R&D business unit for the development of vision capabilities.

Coherix R&D would work with a number of tools such as automated illumination, vision algorithmic, sensing, computer control and software engineering for building suitable solutions for its customers. The tech base and expertise has been brought in from Ann Arbor imaging- based companies and the University of Michigan, to help the engineering team at Coherix to develop holographic interferometry, three-dimensional metrology algorithms, multispectral remote sensing and also laser applications, on which machine vision and custom metrology systems would be built on.

The discovery of micron level of subtle defects in small or large curved surfaces along with high speed three-dimensional sensing systems for semiconductor and electronic inspection applications, perceptive multispectral discrimination of surface contaminants, material or corrosion variations and also holographic measurements of surface defects, which are either micron or submicron level on hard to reach surfaces in the interiors is also included in the business unit’s custom developments.

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